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Kaishi Wang, Xiaohao Zheng, Fumio S. Ohuchi and Rajendra K. Bordia The Conversion of Perhydropolysilazane into SiON Films Characterized by X-Ray Photoelectron Spectroscopy Journal of the American Ceramic Society 95

Version of Record online: 5 NOV 2012 | DOI: 10.1111/jace.12045

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