Jimei Xue, Xiaowei Yin, Fang Ye, Litong Zhang and Laifei Cheng Thermodynamic Analysis on the Codeposition of SiC–Si3N4 Composite Ceramics by Chemical Vapor Deposition using SiCl4–NH3–CH4–H2–Ar Mixture Gases Journal of the American Ceramic Society 96
Article first published online: 12 DEC 2012 | DOI: 10.1111/jace.12115
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