Chemical Vapor Deposition

Cover image for Vol. 20 Issue 7-8-9

Online ISSN: 1521-3862

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Recently Published Articles

  1. Highly Photocatalytically Active Iron(III) Titanium Oxide Thin films via Aerosol-Assisted CVD

    Sanjayan Sathasivam, Davinder S. Bhachu, Yao Lu, Salem M. Bawaked, Abdullah Y. Obaid, Shaeel Al-Thabaiti, Sulaiman N. Basahel, Claire J. Carmalt and Ivan P. Parkin

    Article first published online: 20 NOV 2014 | DOI: 10.1002/cvde.201407143

    Thumbnail image of graphical abstract

    This paper reports the synthesis of Fe2TiO5 thin films from the AACVD of titanium isopropoxide and tris(acetylacetonato)iron in ethyl acetate. Phase-pure Fe2TiO5 was obtained after post-deposition annealing in air at 620 °C. The films showed enhanced photocatalytic properties compared to, and with a FQE in the destruction of resazurin redox dye an order of magnitude greater than, Pilkington ActivTM.

  2. Initiated CVD of Tertiary Amine-Containing Glycidyl Methacrylate Copolymer Thin Films for Low Temperature Aqueous Chemical Functionalization

    Fatma Sarıipek and Mustafa Karaman

    Article first published online: 24 OCT 2014 | DOI: 10.1002/cvde.201407129

    Initiated CVD is used for the synthesis of copolymer films of glycidyl methacrylate (GMA) with diethylaminoethyl methacrylate (DEAEMA). The use of initiator allows high deposition rates at low filament temperatures. A tertiary amine functional group incorporated in the PGMA film acts as a catalyst for the nucleophilic ring-opening reaction of epoxide. iCVD-grown copolymer thin films show improved reactivity towards an aqueous solution of aniline at room temperature.

  3. Coating of Alumina Fibres With Aluminium Phosphate by a Continuous Chemical Vapour Deposition Process

    Sabine Stöckel, Susann Ebert, Maike Böttcher, Andreas Seifert, Thomas Wamser, Walter Krenkel, Steffen Schulze, Michael Hietschold, Helmut Gnaegi and Werner A. Goedel

    Article first published online: 20 OCT 2014 | DOI: 10.1002/cvde.201407099

    Aluminium phosphate layers are generated on the surface of alumina fibres by exposing them to gas mixtures of phosphoryl trichloride and oxygen. Ceramic-matrix composites made by embedding these coated fibres into an alumina matrix show improved fibre pull-out. Thus the coated fibres may be promising as reinforcing fibres of advanced inorganic composites qualified for operating temperatures up to 1200 °C.

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    A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

    Riikka L. Puurunen

    Article first published online: 15 OCT 2014 | DOI: 10.1002/cvde.201402012

    This essay celebrates the fortieth anniversary of ALD in Finland, telling the story of ALE as shared by its inventor, Dr. Tuomo Suntola. The creation of new technologies and products with ALE-ALD, initiated by Dr. Tuomo Suntola and led by him until early 1998, are an integral part of the Finnish industrial history, the fruits of which are seen forty years later in numerous applications worldwide.

  5. Designing Non-uniform Wafer Micro-topography for Macroscopic Uniformity in Multi-scale CVD Processes

    Nikolaos Kallikounis, George Kokkoris, Nikolaos Cheimarios and Andreas G. Boudouvis

    Article first published online: 13 OCT 2014 | DOI: 10.1002/cvde.201407087

    The potential of a designed, non-uniform, density of features on the wafer to improve the macroscopic uniformity is investigated using a multi-scale modeling framework. The case study is Al MOCVD under conditions of low uniformity. Compared to a uniform density of the same number of features, the proposed design methodology leads to a remarkable improvement of both the uniformity and the number of features in which the uniformity is high.