Chemical Vapor Deposition

Cover image for Vol. 20 Issue 7-8-9

Online ISSN: 1521-3862

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Recently Published Articles

  1. Coating of Alumina Fibres With Aluminium Phosphate by a Continuous Chemical Vapour Deposition Process

    Sabine Stöckel, Susann Ebert, Maike Böttcher, Andreas Seifert, Thomas Wamser, Walter Krenkel, Steffen Schulze, Michael Hietschold, Helmut Gnaegi and Werner A. Goedel

    Article first published online: 20 OCT 2014 | DOI: 10.1002/cvde.201407099

    Aluminium phosphate layers are generated on the surface of alumina fibres by exposing them to gas mixtures of phosphoryl trichloride and oxygen. Ceramic-matrix composites made by embedding these coated fibres into an alumina matrix show improved fibre pull-out. Thus the coated fibres may be promising as reinforcing fibres of advanced inorganic composites qualified for operating temperatures up to 1200 °C.

  2. A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

    Riikka L. Puurunen

    Article first published online: 15 OCT 2014 | DOI: 10.1002/cvde.201402012

    Thumbnail image of graphical abstract

    This essay celebrates the fortieth anniversary of ALD in Finland, telling the story of ALE as shared by its inventor, Dr. Tuomo Suntola. The creation of new technologies and products with ALE-ALD, initiated by Dr. Tuomo Suntola and led by him until early 1998, are an integral part of the Finnish industrial history, the fruits of which are seen forty years later in numerous applications worldwide.

  3. Designing Non-uniform Wafer Micro-topography for Macroscopic Uniformity in Multi-scale CVD Processes

    Nikolaos Kallikounis, George Kokkoris, Nikolaos Cheimarios and Andreas G. Boudouvis

    Article first published online: 13 OCT 2014 | DOI: 10.1002/cvde.201407087

    The potential of a designed, non-uniform, density of features on the wafer to improve the macroscopic uniformity is investigated using a multi-scale modeling framework. The case study is Al MOCVD under conditions of low uniformity. Compared to a uniform density of the same number of features, the proposed design methodology leads to a remarkable improvement of both the uniformity and the number of features in which the uniformity is high.

  4. Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films on PET Substrates

    Kamran Ali, Kyung-Hyun Choi and Nauman Malik Muhammad

    Article first published online: 13 OCT 2014 | DOI: 10.1002/cvde.201407126

    Full Paper: A novel technique of roll-to-roll atmospheric ALD using a multiple-slit, gas-source head is implemented to deposit thin films of Al2O3 on a movable web of a PET substrate at 50 °C under the working pressure of 740 Torr. An appreciable growth rate of 0.98 Å per cycle is observed at a carefully optimized web velocity of 7 mm s−1. Good morphological, chemical, electrical, and optical characteristics are shown by the Al2O3 films produced at a large scale, and they have great potential to be used as insulating and protective films in electronic devices.

  5. CVD on Optical Fibers: Tilted Fiber Bragg Gratings as Real-time Sensing Platforms

    David J. Mandia, Wenjun Zhou, Jacques Albert and Seán T. Barry

    Article first published online: 8 OCT 2014 | DOI: 10.1002/cvde.201400059

    This review highlights optical fiber-based, tilted fiber Bragg grating (TFBG) devices as sensors in the real-time monitoring of group 11 (Cu, Ag, Au) metal-organic (MO) and pulsed (p)-CVD). This new in-situ optical probe, while both a substrate and sensor, detects the nucleation and growth of metal and metal oxide thin films based on local refractive index changes of the TFBG under S- and P-polarized core-guided light. The coated TFBGs have many promising applications in plasmonic sensing and optoelectronics.

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