Chemical Vapor Deposition
© WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Online ISSN: 1521-3862
CVD now publishing as a section
from 2016, the journal Chemical Vapor Deposition will be published as a section of the journal Advanced Materials Interfaces.
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Recently Published Articles
- From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition (pages 216–240)
Anatolii A. Malygin, Victor E. Drozd, Anatolii A. Malkov and Vladimir M. Smirnov
Version of Record online: 17 DEC 2015 | DOI: 10.1002/cvde.201502013
The history of creation and development of ALD, which has been known in the USSR-Russia as molecular layering technique (ML), is described. The “framework” hypothesis and its connection with principles of the method ML, provides information about the ML groups in Russia and their scientific results from the 1960s to the present time.
- Phase-selective Route to V-O Film Formation: A Systematic MOCVD Study Into the Effects of Deposition Temperature on Structure and Morphology (pages 319–326)
Simon F. Spanò, Roberta G. Toro, Guglielmo G. Condorelli, Grazia M. L. Messina, Giovanni Marletta and Graziella Malandrino
Version of Record online: 23 NOV 2015 | DOI: 10.1002/cvde.201507186
A systematic study is carried out into the MOCVD of V-O films using the vanadyl-acetylacetonate precursor on a Si(001) substrate. XRD data point to the formation of crystalline films in the range 200–550 °C, with different phases forming within the investigated range.
- CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating Characteristics (pages 327–333)
Marina V. Baryshnikova, Leonid A. Filatov, Andrey S. Petrov and Sergey E. Alexandrov
Version of Record online: 23 NOV 2015 | DOI: 10.1002/cvde.201507187
An experimental evaluation of TiO2 thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. Sensors produced on the basis of titania films containing the highest amount of anatase phase and with the lowest grain size (a typical SEM image is shown) are characterized by highest values of response and shortest response-recovery times.
- Uniform Coating of Microparticles using CVD Polymerization (pages 288–293)
Yu Liang, Jacob H. Jordahl, Hao Ding, Xiaopei Deng and Joerg Lahann
Version of Record online: 23 NOV 2015 | DOI: 10.1002/cvde.201507197
A custom-designed fluidized bed reactor is attached to the outlet of a CVD polymerization system, thereby imparting chemical functionality on the surface of microparticles. Functional polymer films are shown to fully coat the 3D surface of particles. This technique, in concert with metal deposition, produces Janus particles. These coated particles have a wide range of potential uses in biotechnology.