23_37i/2011Carbon Nanotubes: Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing (Adv. Mater. 37/2011)

Carbon nanotube (CNT) arrays are used as removable dry adhesives for high-temperature processes. As reported by Jongbaeg Kim and co-workers on page 4285, the adhesion force between the self-assembled CNTs is used to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by CNT adhesives and the proposed method could be expanded to diverse 3D microstructure fabrication.

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