© WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Editor-in-Chief: Peter Gregory, Deputy Editors: Mary De Vita, Duoduo Liang, Lorna Stimson
Online ISSN: 1521-4095
Associated Title(s): Advanced Electronic Materials, Advanced Energy Materials, Advanced Engineering Materials, Advanced Functional Materials, Advanced Healthcare Materials, Advanced Materials Interfaces, Advanced Materials Technologies, Advanced Optical Materials, Advanced Science, Laser & Photonics Reviews, Particle & Particle Systems Characterization, Small
Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)
The image depicts the flexible control over the directed self-assembly of block copolymers that can be achieved using small topographical templates. On page 3107, H.-S. P. Wong and co-workers explain how differently shaped templates cause the block copolymer to self-assemble to form corresponding nanopatterns, providing a potential solution to contact-hole patterning for integrated circuits beyond the 22 nm technology node.