Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures
Yong-Chao Tang, Hui Zhang, Sangil Kwon, Hamid R. Mohebbi, David G. Cory, Li-Cong Peng, Lin Gu, Hai-Zhong Guo, Kui-Juan Jin and Guo-Xing Miao
Version of Record online: 17 AUG 2016 | DOI: 10.1002/adem.201600226
We grow and characterize novel composite films of TiN/Tapering/NbN/Tapering/TiN on c-cut sapphire substrate. The tapering layer is a gradual transition between TiN and NbN so that no distinct interface exists. A micro-strip resonator is fabricated and its intrinsic quality factors from the composite film under 16 mK is over 9 000 at 0 field and 5 300 under 100 mK at 0.35 T. The resonators are designed to support electron spin resonance for sensing and quantum information processing.