physica status solidi (c)
© WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Editor: Stefan Hildebrandt (Editor-in-Chief)
Online ISSN: 1610-1642
Cover Picture: Phys. Status Solidi C 6/3
A single crystal silicon mirror technology based on BSOI (Bonded Silicon on Insulator) wafers is presented in the article by Harald Schenk et al. on p. 728 to fabricate one- and two-dimensional scanning mirrors. A design approach is used for the mirror suspension.
The cover picture shows a micrograph of a spring suspension realized in single crystalline silicon. Two piezoresistive volume transducer elements are attached to the spring forming the resistors R1 and R2. Read-out of the resistances allows to determine the torsional angle of the spring (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)