physica status solidi (c)

Cover image for Vol. 14 Issue 1-2

Editor: Stefan Hildebrandt (Editor-in-Chief)

Online ISSN: 1610-1642

Associated Title(s): physica status solidi (a), physica status solidi (b), physica status solidi (RRL) - Rapid Research Letters

6_03/2009Cover Picture: Phys. Status Solidi C 6/3

A single crystal silicon mirror technology based on BSOI (Bonded Silicon on Insulator) wafers is presented in the article by Harald Schenk et al. on p. 728 to fabricate one- and two-dimensional scanning mirrors. A design approach is used for the mirror suspension.

The cover picture shows a micrograph of a spring suspension realized in single crystalline silicon. Two piezoresistive volume transducer elements are attached to the spring forming the resistors R1 and R2. Read-out of the resistances allows to determine the torsional angle of the spring (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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