Plasma Processes and Polymers

Cover image for Vol. 12 Issue 1

Online ISSN: 1612-8869

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Recently Published Articles

  1. Highly Conductive Cu Thin Film Deposition on Polyimide by RF-Driven Atmospheric Pressure Plasma Jets under Nitrogen Atmosphere

    Peng Zhao, Wei Zheng, Jun Watanabe, Yue Dong Meng and Masaaki Nagatsu

    Article first published online: 20 JAN 2015 | DOI: 10.1002/ppap.201400093

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    The characteristics of Cu films deposited on polyimide by Ar/H2 gas RF-driven atmospheric pressure plasma jets under N2 atmosphere are investigated. Adding H2 to Ar plasmas and replacing air with N2 gas increased the deposition rates. Furthermore, higher purity Cu films were obtained.

  2. The Influence of H2 Plasma Treatment on LWR Mitigation: The Importance of EUV Photoresist Composition

    Peter De Schepper, Ziad el Otell, Alessandro Vaglio Pret, Efrain Altamirano-Sanchez and Stefan De Gendt

    Article first published online: 19 JAN 2015 | DOI: 10.1002/ppap.201400157

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    The role of EUV photoresist chemistry and the importance of its additives, the fluorine group and ester functionalities, on line width roughness reduction after H2 plasma treatment is presented. Controlling the LWR has become a key challenge as the semiconductor industry pursues Moore's law towards smaller dimension. The effect of this treatment is evaluated and discussed for various line widths.

  3. Rapid Formation of Transparent Superhydrophobic Film on Glasses by He/CH4/C4F8 Plasma Deposition at Atmospheric Pressure

    Duksun Han and Se Youn Moon

    Article first published online: 19 JAN 2015 | DOI: 10.1002/ppap.201400145

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    The fabrication method of superhydrophobic surface by atmospheric pressure plasma presented, which transparency of surfaces were cont rolled by gas ratio between CH4 and C4F8. The process time was under 1 min, and any pre-treatment process was unnecessary. This simple and rapid treatment technique is very suitable for batch process in a wide range.

  4. Exploring the Structure of the Modified Top Layer of Polypropylene During Plasma Treatment

    Carles Corbella, Simon Große-Kreul and Achim von Keudell

    Article first published online: 19 JAN 2015 | DOI: 10.1002/ppap.201400188

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    Time-resolved FTIR diagnostics is used to investigate in situ the surface modification of polypropylene films during plasma treatment. Quantified beams of ions, neutrals, and UV photons generate a modified top layer with a characteristic structure. This layer is modeled as the combination of a pristine polypropylene fraction plus a cross-linked fraction consisting of amorphous hydrogenated carbon.

  5. Local Analysis of Pet Surface Functionalization by an Atmospheric Pressure Plasma Jet

    Iu Onyshchenko, Anton Yu Nikiforov, Nathalie De Geyter and Rino Morent

    Article first published online: 19 JAN 2015 | DOI: 10.1002/ppap.201400166

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    An atmospheric pressure plasma jet, operated with argon gas, is used for effective PET surface modification. Different treatment conditions are investigated to define their importance in changing the radial hydrophilic region. To determine the significance of the plasma operational parameters, the plasma jet footprint is examined by X-ray photoelectron spectroscopy and water contact angle measurements.

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