Advanced Functional Materials

Cover image for Vol. 27 Issue 20

22_06b/2012Silicon Micromachining: Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring (Adv. Funct. Mater. 6/2012)

On page 1222, Giuseppe Barillaro and co-workers demonstrate that electrochemical micromachining (ECM) technology allows the fabrication of silicon microstructures with various shapes and silicon microsystems with high complexity to be performed in any research laboratory with sub-micrometer accuracy up to the highest aspect ratio values using dynamical real-time control of the etching anisotropy. False-color scanning electron microscopy (SEM) images of a silicon microgripper fabricated using ECM technology are acquired at different magnifications.

Read Full Text  | Table of Contents

SEARCH

SEARCH BY CITATION