Research Article
Free Access
High contrast scanning nano‐Raman spectroscopy of silicon
Abstract
We have demonstrated that scanning nano‐Raman spectroscopy (SNRS), generally known as tip‐enhanced Raman spectroscopy (TERS), with side illumination optics can be effectively used for analysis of silicon‐based structures at the nanoscale. Even though the side illumination optics has disadvantages such as difficulties in optical alignment and shadowing by the tip, it has the critical advantage that it may be used for the analysis of nontransparent samples. A key criterion for making SNRS effective for imaging Si samples is the optimization of the contrast between near‐field and far‐field (background) Raman signals. This has been achieved by optimizing the beam polarization, resulting in an order of magnitude improvement in the contrast. We estimate the lateral resolution of our Raman images to be ∼20 nm. Copyright © 2007 John Wiley & Sons, Ltd.
Citing Literature
Number of times cited: 67
- Yanqi Liu, Lijiang Zhao, Xinjuan Li, Zhuo Zeng, Peijie Wang, Lisheng Zhang and Yan Fang, Investigation of plasmon properties of silver microsphere array demonstrated experimentally by tip-enhanced Raman spectroscopy, Applied Surface Science, 10.1016/j.apsusc.2017.09.227, 428, (900-905), (2018).
- Amun Jarzembski, Cedric Shaskey and Keunhan Park, Review: Tip-based vibrational spectroscopy for nanoscale analysis of emerging energy materials, Frontiers in Energy, (2018).
- Ridong Wang, Pengyu Yuan, Meng Han, Shen Xu, Tianyu Wang and Xinwei Wang, Asymmetry of Raman scattering by structure variation in space, Optics Express, 25, 15, (18378), (2017).
- Prabhat Verma, Tip-Enhanced Raman Spectroscopy: Technique and Recent Advances, Chemical Reviews, 10.1021/acs.chemrev.6b00821, 117, 9, (6447-6466), (2017).
- Wanyi Fu and Wen Zhang, Hybrid AFM for Nanoscale Physicochemical Characterization: Recent Development and Emerging Applications, Small, 13, 11, (2017).
- Hagit Aviv, Shirly Berezin, Ortal Agai, Miri Sinwani and Yaakov R. Tischler, Deposition and Characterization of Roughened Surfaces, Langmuir, 33, 8, (1810), (2017).
- Shirly Berezin, Yaron Aviv, Hagit Aviv, Elad Goldberg and Yaakov R. Tischler, Replacing a Century Old Technique – Modern Spectroscopy Can Supplant Gram Staining, Scientific Reports, 7, 1, (2017).
- Naresh Kumar, Alina Zoladek-Lemanczyk, Anne A. Y. Guilbert, Weitao Su, Sachetan M. Tuladhar, Thomas Kirchartz, Bob C. Schroeder, Iain McCulloch, Jenny Nelson, Debdulal Roy and Fernando A. Castro, Simultaneous topographical, electrical and optical microscopy of optoelectronic devices at the nanoscale, Nanoscale, 9, 8, (2723), (2017).
- Jacob D. Scherger and Mark D. Foster, Tunable, Liquid Resistant Tip Enhanced Raman Spectroscopy Probes: Toward Label-Free Nano-Resolved Imaging of Biological Systems, Langmuir, 10.1021/acs.langmuir.7b01338, 33, 31, (7818-7825), (2017).
- Tanja Deckert-Gaudig, Atsushi Taguchi, Satoshi Kawata and Volker Deckert, Tip-enhanced Raman spectroscopy – from early developments to recent advances, Chemical Society Reviews, 10.1039/C7CS00209B, 46, 13, (4077-4110), (2017).
- Arianna Lucia, Onofrio Antonino Cacioppo, Enrico Iulianella, Luca Latessa, Giuseppe Moccia, Daniele Passeri and Marco Rossi, Capability of tip-enhanced Raman spectroscopy about nanoscale analysis of strained silicon for semiconductor devices production, Applied Physics Letters, 110, 10, (103105), (2017).
- Jacob D. Scherger, Edward A. Evans, Joseph A. Dura and Mark D. Foster, Extending nanoscale spectroscopy with titanium nitride probes, Journal of Raman Spectroscopy, 47, 11, (1332-1336), (2016).
- R. Hermann and M. J. Gordon, Subdiffraction‐limited chemical imaging of patterned phthalocyanine films using tip‐enhanced near‐field optical microscopy, Journal of Raman Spectroscopy, 47, 11, (1287-1292), (2016).
- A. L. Heilman and M. J. Gordon, Tip-enhanced near-field optical microscope with side-on and ATR-mode sample excitation for super-resolution Raman imaging of surfaces, Journal of Applied Physics, 119, 22, (223103), (2016).
- Weitao Su, Naresh Kumar, Sandro Mignuzzi, Jason Crain and Debdulal Roy, Nanoscale mapping of excitonic processes in single-layer MoS 2 using tip-enhanced photoluminescence microscopy , Nanoscale, 10.1039/C5NR07378B, 8, 20, (10564-10569), (2016).
- Rebecca L. Agapov, Jacob D. Scherger, Alexei P. Sokolov and Mark D. Foster, Identification of individual isotopes in a polymer blend using tip enhanced Raman spectroscopy, Journal of Raman Spectroscopy, 46, 5, (447-450), (2015).
- N. Kumar, B. Stephanidis, R. Zenobi, A. J. Wain and D. Roy, Nanoscale mapping of catalytic activity using tip-enhanced Raman spectroscopy, Nanoscale, 7, 16, (7133), (2015).
- Kunal Kashyap, Amarendra Kumar, Chuan-Torng Huang, Yu-Yun Lin, Max T. Hou and J. Andrew Yeh, Elimination of strength degrading effects caused by surface microdefect: A prevention achieved by silicon nanotexturing to avoid catastrophic brittle fracture, Scientific Reports, 5, 1, (2015).
- Naresh Kumar, Sandro Mignuzzi, Weitao Su and Debdulal Roy, Tip-enhanced Raman spectroscopy: principles and applications, EPJ Techniques and Instrumentation, 10.1140/epjti/s40485-015-0019-5, 2, 1, (2015).
- Teng-Xiang Huang, Sheng-Chao Huang, Mao-Hua Li, Zhi-Cong Zeng, Xiang Wang and Bin Ren, Tip-enhanced Raman spectroscopy: tip-related issues, Analytical and Bioanalytical Chemistry, 10.1007/s00216-015-8968-8, 407, 27, (8177-8195), (2015).
- Rui Yang, Tina He, Mary Anne Tupta, Carine Marcoux, Philippe Andreucci, Laurent Duraffourg and Philip X-L Feng, Probing contact-mode characteristics of silicon nanowire electromechanical systems with embedded piezoresistive transducers, Journal of Micromechanics and Microengineering, 25, 9, (095014), (2015).
- Gaurav Sharma, Tanja Deckert-Gaudig and Volker Deckert, Tip-enhanced Raman scattering—Targeting structure-specific surface characterization for biomedical samples, Advanced Drug Delivery Reviews, 10.1016/j.addr.2015.06.007, 89, (42-56), (2015).
- Dai Zhang and Alfred J. Meixner, Scanning Near‐Field Gap‐Mode Microscopy, Handbook of Spectroscopy, (911-940), (2014).
- Taka‐aki Yano and Satoshi Kawata, Tip‐Enhanced Raman Spectroscopy (TERS) for Nanoscale Imaging and Analysis, Frontiers of Surface‐Enhanced Raman Scattering, (139-161), (2014).
- I. Lorite, A. Serrano, A. Schwartzberg, J. Bueno and J.L. Costa-Krämer, Surface enhanced Raman spectroscopy by titanium nitride non-continuous thin films, Thin Solid Films, 531, (144), (2013).
- Hao Wang and Zachary D. Schultz, The chemical origin of enhanced signals from tip-enhanced Raman detection of functionalized nanoparticles, The Analyst, 138, 11, (3150), (2013).
- Mingqian Zhang, Rui Wang, Zhendong Zhu, Jia Wang and Qian Tian, Experimental research on the spectral response of tips for tip-enhanced Raman spectroscopy, Journal of Optics, 15, 5, (055006), (2013).
- Manola Moretti, Remo Proietti Zaccaria, Emiliano Descrovi, Gobind Das, Marco Leoncini, Carlo Liberale, Francesco De Angelis and Enzo Di Fabrizio, Reflection-mode TERS on Insulin Amyloid Fibrils with Top-Visual AFM Probes, Plasmonics, 10.1007/s11468-012-9385-x, 8, 1, (25-33), (2012).
- Manuel Lopes, Timothée Toury, Marc Lamy de La Chapelle, Francesco Bonaccorso and Pietro Giuseppe Gucciardi, Fast and reliable fabrication of gold tips with sub-50 nm radius of curvature for tip-enhanced Raman spectroscopy, Review of Scientific Instruments, 10.1063/1.4812365, 84, 7, (073702), (2013).
- Tamás Firkala, Attila Farkas, Balázs Vajna, István Farkas and György Marosi, Investigation of drug distribution in tablets using surface enhanced Raman chemical imaging, Journal of Pharmaceutical and Biomedical Analysis, 10.1016/j.jpba.2012.12.017, 76, (145-151), (2013).
- Norihiko Hayazawa and Taka-aki Yano, Tip-Enhanced Spectroscopy at the Nanoscale, Nanoscale Spectroscopy with Applications, 10.1201/b15615-2, (1-40), (2013).
- S.S. Sheiko and S.N. Magonov, Scanning Probe Microscopy of Polymers, Polymer Science: A Comprehensive Reference, 10.1016/B978-0-444-53349-4.00047-9, (559-605), (2012).
- Marcel Lucas and Elisa Riedo, Invited Review Article: Combining scanning probe microscopy with optical spectroscopy for applications in biology and materials science, Review of Scientific Instruments, 10.1063/1.4720102, 83, 6, (061101), (2012).
- Yuika Saito, Yoshiro Ohashi and Prabhat Verma, Optimization ofs-Polarization Sensitivity in Apertureless Near-Field Optical Microscopy, International Journal of Optics, 2012, (1), (2012).
- V. Le Nader, J.-Y. Mevellec, T. Minea and G. Louarn, Gold Nanoparticles as Probes for Nano-Raman Spectroscopy: Preliminary Experimental Results and Modeling, International Journal of Optics, 2012, (1), (2012).
- MingQian Zhang, Rui Wang, XiaoBin Wu and Jia Wang, Principle, system, and applications of tip-enhanced Raman spectroscopy, Science China Physics, Mechanics and Astronomy, 55, 8, (1335), (2012).
- D.A. Schmidt, I. Kopf and E. Bründermann, A matter of scale: from far‐field microscopy to near‐field nanoscopy, Laser & Photonics Reviews, 6, 3, (296-332), (2011).
- Johannes Stadler, Thomas Schmid and Renato Zenobi, Developments in and practical guidelines for tip-enhanced Raman spectroscopy, Nanoscale, 10.1039/C1NR11143D, 4, 6, (1856-1870), (2012).
- R. D. Rodriguez, E. Sheremet, S. Müller, O. D. Gordan, A. Villabona, S. Schulze, M. Hietschold and D. R. T. Zahn, Compact metal probes: A solution for atomic force microscopy based tip-enhanced Raman spectroscopy, Review of Scientific Instruments, 10.1063/1.4770140, 83, 12, (123708), (2012).
- Zhi Li, Wei Li, Yadong Jiang, Haihong Cai, Yuguang Gong and Jian He, Raman characterization of the structural evolution in amorphous and partially nanocrystalline hydrogenated silicon thin films prepared by PECVD, Journal of Raman Spectroscopy, 42, 3, (415-421), (2011).
- Rebecca L. Agapov, Andrey V. Malkovskiy, Alexei P. Sokolov and Mark D. Foster, Prolonged Blinking with TERS Probes, The Journal of Physical Chemistry C, 115, 18, (8900), (2011).
- Peter Hermann, Michael Hecker, Dmytro Chumakov, Martin Weisheit, Jochen Rinderknecht, Artem Shelaev, Pavel Dorozhkin and Lukas M. Eng, Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy, Ultramicroscopy, 111, 11, (1630), (2011).
- Pietro Giuseppe Gucciardi and Jean-Christophe Valmalette, Different longitudinal optical—transverse optical mode amplification in tip enhanced Raman spectroscopy of GaAs(001), Applied Physics Letters, 97, 26, (263104), (2010).
- Samuel Berweger and Markus B. Raschke, Signal limitations in tip-enhanced Raman scattering: the challenge to become a routine analytical technique, Analytical and Bioanalytical Chemistry, 396, 1, (115), (2010).
- Ze Xiang Shen, Johnson Kasim and Ting Yu, Near‐Field Raman Imaging of Nanostructures and Devices, Advanced Nanomaterials, (677-697), (2010).
- Satoshi Kawata, Yasushi Inouye and Prabhat Verma, Plasmonics for near-field nano-imaging and superlensing, Nature Photonics, 3, 7, (388), (2009).
- Vladimir Poborchii, Tetsuya Tada, Toshihiko Kanayama and Pavel Geshev, Optimization of tip material and shape for near‐UV TERS in Si structures, Journal of Raman Spectroscopy, 40, 10, (1377-1385), (2009).
- A. V. Malkovskiy, V. I. Malkovsky, A. M. Kisliuk, C. A. Barrios, M. D. Foster and A. P. Sokolov, Tip‐induced heating in apertureless near‐field optics, Journal of Raman Spectroscopy, 40, 10, (1349-1354), (2009).
- Katrin F. Domke and Bruno Pettinger, Tip‐enhanced Raman spectroscopy of 6H‐SiC with graphene adlayers: selective suppression of E1 modes, Journal of Raman Spectroscopy, 40, 10, (1427-1433), (2009).
- A. Merlen, J. C. Valmalette, P. G. Gucciardi, M. Lamy de la Chapelle, A. Frigout and R. Ossikovski, Depolarization effects in tip‐enhanced Raman spectroscopy, Journal of Raman Spectroscopy, 40, 10, (1361-1370), (2009).
- Gennaro Picardi, Marc Chaigneau, Razvigor Ossikovski, Christophe Licitra and Guillame Delapierre, Tip enhanced Raman spectroscopy on azobenzene thiol self‐assembled monolayers on Au(111), Journal of Raman Spectroscopy, 40, 10, (1407-1412), (2009).
- Boon‐Siang Yeo, Thomas Schmid, Weihua Zhang and Renato Zenobi, Spectroscopic Imaging with Nanometer Resolution Using Near‐Field Methods, Infrared and Raman Spectroscopic Imaging, (473-499), (2009).
- Alvarado Tarun, Norihiko Hayazawa and Satoshi Kawata, Tip-enhanced Raman spectroscopy for nanoscale strain characterization, Analytical and Bioanalytical Chemistry, 394, 7, (1775), (2009).
- T. Deckert‐Gaudig, E. Bailo and V. Deckert, Perspectives for spatially resolved molecular spectroscopy – Raman on the nanometer scale, Journal of Biophotonics, 1, 5, (377-389), (2008).
- W. Kiefer, Recent advances in linear and nonlinear Raman spectroscopy II, Journal of Raman Spectroscopy, 39, 12, (1710-1725), (2008).
- J. Kasim, X. Y. Tee, Y. M. You, Z. H. Ni, Y. Setiawan, P. S. Lee, L. Chan and Z. X. Shen, Plasmon‐enhanced polarized Raman spectroscopy for sensitive surface characterization, Journal of Raman Spectroscopy, 39, 10, (1338-1342), (2008).
- K. J. Yi, X. N. He, Y. S. Zhou, W. Xiong and Y. F. Lu, Tip-enhanced near-field Raman spectroscopy with a scanning tunneling microscope and side-illumination optics, Review of Scientific Instruments, 79, 7, (073706), (2008).
- P G Gucciardi, M Lopes, R Déturche, C Julien, D Barchiesi and M Lamy de la Chapelle, Light depolarization induced by metallic tips in apertureless near-field optical microscopy and tip-enhanced Raman spectroscopy, Nanotechnology, 19, 21, (215702), (2008).
- Johnson Kasim, Yu Ting, You Y. Meng, Liu J. Ping, Alex See, Li L. Jong and Shen Z. Xiang, Near-field Raman imaging using optically trapped dielectric microsphere, Optics Express, 16, 11, (7976), (2008).
- S. Shamuilia, V. V. Afanas’ev, A. Stesmans, I. McCarthy, S. A. Campbell, M. Boutchich, M. Roeckerath, T. Heeg, J. M. J. Lopes and J. Schubert, Photoconductivity of Hf-based binary metal oxide systems, Journal of Applied Physics, 104, 11, (114103), (2008).
- Alvarado Tarun, Norihiko Hayazawa, Masashi Motohashi and Satoshi Kawata, Highly efficient tip-enhanced Raman spectroscopy and microscopy of strained silicon, Review of Scientific Instruments, 79, 1, (013706), (2008).
- Masashi Motohashi, Norihiko Hayazawa, Alvarado Tarun and Satoshi Kawata, Depolarization effect in reflection-mode tip-enhanced Raman scattering for Raman active crystals, Journal of Applied Physics, 103, 3, (034309), (2008).
- Gennaro Picardi, Quang Nguyen, Razvigor Ossikovski and Joachim Schreiber, Polarization Properties of Oblique Incidence Scanning Tunneling Microscopy—Tip-Enhanced Raman Spectroscopy, Applied Spectroscopy, 10.1366/000370207783292109, 61, 12, (1301-1305), (2016).
- Catalin C. Neacsu, Samuel Berweger and Markus B. Raschke, Tip-Enhanced Raman Imaging and Nanospectroscopy: Sensitivity, Symmetry, and Selection Rules, NanoBiotechnology, 10.1007/s12030-008-9015-z, 3, 3-4, (172-196), (2009).
- Gwénaël Gouadec and Philippe Colomban, Raman spectroscopy of nanostructures and nanosized materials, Journal of Raman Spectroscopy, 38, 6, (598-603), (2007).
- Kirsty F. Gibson and Sergei G. Kazarian, Tip‐enhanced Raman Spectroscopy, Encyclopedia of Analytical Chemistry, (1-30), (2014).
- Nastaran Kazemi-Zanjani, Erwan Kergrene, Lijia Liu, Tsun-Kong Sham and François Lagugné-Labarthet, Tip-Enhanced Raman Imaging and Nano Spectroscopy of Etched Silicon Nanowires, Sensors, 10.3390/s131012744, 13, 10, (12744-12759), (2013).
