Communication
Synthesis and Fabrication of High‐Performance n‐Type Silicon Nanowire Transistors†
†
The authors thank Yue Wu and Zhaohui Zhong for discussion. This work was supported by the Defense Advanced Research Projects Agency, National Cancer Institute, and the Ellison Medical Foundation.
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Abstract
Single crystal n‐type silicon nanowires (SiNWs) with controlled phosphorus dopant concentrations have been successfully synthesized for the first time (see Figure). Field‐effect transistor (FET) devices fabricated from these n‐SiNWs exhibit good device properties, with mobilities more than 100 times greater than previous reports, and comparable to high‐performance planar silicon FETs.
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